Creating nano-sized contact openings in the thick dielectric-based passivation layers for ultrathin CIGS solar cells: A cost and time-effective approach

In this contribution, a cost- and time- effective contacting approach is presented for dielectric-based rear surface passivation layers up to 30 nm. Nano-size and homogenously distributed openings are realized in AlOx passivation layer by selenization of LiF salt on top, and monitored via SEM. Further, this layer was implemented into sub-micron thick CIGS solar cells. Consequently, contact openings facilitate the current collection through the dielectric layer up to 30 nm thick. However, solar cell parameters remain the same, even worse than the reference. Thus, this approach is still open for optimizations.