Thrust Force Ripple Optimization of MEMS Permanent Magnet Linear Motor Based on Harmonic Current Injection

This paper presents a method optimizing the thrust force of a Micro Electro Mechanical System (MEMS) Permanent Magnet Linear Motor, based on harmonic current injection. Fourier decomposition is implemented to the air gap flux density of the motor to derive the fitting expression of the thrust force dependent to exciting current. Through analyzing the thrust force ripple of sinusoidal current excitement, the paper comes up with the strategy of harmonic current injection to eliminate the ripple component in the thrust force waveform. Mathematical demonstration is given that injecting harmonic current can totally eliminate the ripple caused by odd component of vertical air gap magnetic induction intensity. Simulation verification is implemented based on the 3
^rd
and 7
^th
harmonic injection control strategy, proving that the method is feasible for the thrust ripple is reduced to 4.3% of the value before optimazation. Experimental results lead to the consistent conclusion that the strategy shows good steady-state and dynamic performance.