Torsional MEMS Scanner Based on LiNbO3 Thin Film

This article presents the micro-scanners based on 36Y-cut lithium niobate thin film (LiNbO
3
) to be used for projection display and optical attenuators. Through the analysis of different design parameters of micro-scanner structure, LiNbO
3
micro-scanner has been proved to have lithographically defined scanning frequency with large scanning angles. A micro-scanner of high scanning angle has been designed, fabricated and characterized. The design has a total size of 15 × 270 µ m
²
, and driving efficiency of 13.21° at 135.5 kHz and input voltage of 10 V. Our devices show great potential for micro-scanners application where it has large potential of raster scanning upon further scaling in driving efficiency.