A Resonant Differential Pressure Microsensor with Compensations of Temperature and Static Pressure

This paper presents a resonant differential pressure (DP) microsensor with compensations of temperature (T) and static pressure (SP). In this microsensor, three resonators were positioned on and beside the pressure sensitive diaphragm with intrinsic frequencies (
$f_{1}, f_{2}$
and
$f_{3}$
) translated to differential pressure under the interferences of temperature and static pressure. Numerical simulations were conducted, confirming that
$f_{1}\sim f_{3}$
were modulated by differential pressure, temperature and static pressure. Device fabrication and experimental characterization were realized, finding the maximum fitting differential pressure error was decreased from 3.08 kPa (before compensation) to 0.28 kPa (after compensation) under differential pressure from 0 kPa to 100 kPa, temperature from 20°C to 60°C and static pressure from 110 kPa to 190 kPa.