MEMS Flow Sensor Capable of Measuring Multi-Vital Signs of Respiration, Heart Rate, and Body Temperature

Multi-vital signs detection; respiration, heart rate, and body temperature from respiration airflow at the mouth was proposed, and three sensors patterns (flow-rate, - direction, and -temperature sensors) were formed on a single MEMS sensor. The small-sized tube type flow sensor was designed and fabricated to apply it the animal experiment, and its detection characteristics were experimentally evaluated. The flow rate sensor output followed the King's equation, and the response time of 50 ms was obtained to confirm the following oscillating breathing airflow measurement. Then, we confirmed that the fabricated sensor can measure the airflow whose temperature changes periodically. Finally, we conducted an animal experiment using rats, and confirmed that the fabricated sensor can measure three vital signs of respiration, heart rate, and body temperature from respiration.