Impact of Source Side Cavity on Sensitivity of Hetero Channel Double Gate MOSFET Biosensor

In this paper, a dielectric modulated hetero channel (InP/InGaAs/InP) MOSFET with source-side cavity (DM-H-SC) biosensor is presented for identification of biomolecules like uricase, streptavidin, Ferro-cytochrome, and Protein. In the proposed structure, neutral biomolecules are simulated with their respective dielectric constants but charged biomolecules are simulated with both dielectric constant and charge density. Numerous electrical features such as surface potential, electric field, threshold voltage, and sensitivity of the proposed device have been estimated using the 2D TCAD platform. The highest sensitivity of 0.52 is realized for protein in comparison to uricase, streptavidin, Ferro-cytochrome. Again, a low peak electric field of 0.9× 10
⁶
V/cm is obtained at the drain end for protein as compared to other biomolecules.