Design and Simulation of a Piezoelectric Micro-QCM with High Resonance Frequency and Quality Factor

This paper proposes an improved micro quartz crystal microbalance (micro-QCM) with high resonance frequency and high quality factor. By designing a composite inverted-mesa and convex structure, the energy trapping effect, resonant frequency and mechanical strength of the piezoelectric quartz crystal resonator are enhanced. The coupling of vibration modes is also reduced with the increase of quality factor. The electro-mechanical behaviors of the presented micro-QCM are simulated with the commercially finite element software package COMSOL. By analyzing the influence of electrode size, diameter and thickness of convex, the geometric parameters are optimized with the multi-physics field coupling simulation. Moreover, the presented micro-QCM has a smaller power consumption and higher mass sensitivity.