Nanofabrication Toward High-Resolution and Large Area

Motivated by the huge demands for large scale photonic structures, micro-/nanofabrication technologies, especially laser direct writing (LDW) technologies, have made great progress in the past few years in the aspect of resolution, scalability, and fabrication throughput. This review will provide a comprehensive study on the research progress and latest achievements of LDW. Moreover, the patterning solutions with the feature of high resolution and large area for 2.5D structures, and periodic structures will be discussed, respectively. Finally, an outlook on the possible future directions of LDW methods will be proposed.