Resilient Ultra Stable CMOS-MEMS Oscillator with Receiver in Intel 22FFL Technology

A frequency-scalable reference oscillator based on a Scandium doped Aluminum Nitride-on-silicon contour-mode micromechanical resonator is demonstrated for the first time which utilizes an oscillator receiver implemented in Intel 22FFL node. The oscillator operates at 95 MHz, with a total power consumption of 1 mW including the amplitude/bias control and the shaper circuitry (@1.2 V supply). A phase noise of -107 dBc/Hz @ 1 kHz offset and an RMS jitter of 870 fs over the frequency range of 12kHz-5MHz are measured for this oscillator. Aging is also studied over a period of 25 days with a promising frequency drift of less than 4 ppm. The temperature compensated ScAlN on silicon resonator exhibited a quality factor of 5k and maximum frequency vs temperature variation of 450 ppm over the -40 °C to 125 °C temperature range making the oscillator a viable alternative for reference crystal oscillators in computing systems.