Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT

In this paper, we report the design, microfabrication and characterizations of a dual-axis MEMS mirror based on an unconventional Ba-doped PZT piezo thin-film produced using pulsed laser deposition. The mirror features three resonant modes: one low frequency bending mode at 490 Hz and two high frequency torsional modes at 9 kHz and 25 kHz both excited with a dog-bone shaped actuator. Excited at 2Vpp and 5Vpp, the optical scan angle of 15.5° and 6° was measured for slow and fast axis respectively. We show that the obtained results are comparable to the state-of-the art using classical sol-gel deposition, demonstrating high potential of using pulsed laser deposition for PZT MEMS devices.