High Q factor and high transmittance suspended membrane THz PhC cavity: experimental demonstration for sensing applications

We present designs and measurements of integrated high resistivity (HR) Si PhC waveguide Bragg reflectors with 100 GHz band gap close to 0.6THz, respectively suspended in air or supported by a teflon tube. Resonant defect modes both in the air and dielectric Bloch bands of the PhC with large Q factors (up to 18000) and high transmittance (up to 72%) are measured and reported by engineering the periodicity of the PhC mirrors.