Enhancement of Indium Tin Oxide Nano-Scale Films for Terahertz Device Applications Treated by Rapid Thermal Annealing

In this paper, we tune the terahertz (THz) optical and electrical properties of indium tin oxide (ITO) nano-thick film by rapid thermal annealing (RTA). Besides, thickness-dependent THz transmittance properties of as-deposited ITO thin film is investigated. The ITO film can be functioned as a THz reflective conductive electrodes by RTA at 600°C. THz power transmittance improved from 6 to 49 % at 0.2 THz by RTA at 800°C. Furthermore, we extracted complex refractive indices of as sputtered and annealed ITO films, and fitted the results with the Drude model. Additionally, the structural and morphological properties of ITO samples are presented.