Miniaturization of 5G N77 Bandpass Filter with HR-Si IPD Technology

A compact lumped high-selectivity bandpass filter suitable for 5G communication using high resistivity silicon integrated passive device (IPD) technology is presented in this paper. The use of IPD technology can effectively improve the integration of passive devices and reduce the size of devices, which is of great significance for the low-cost and miniaturized system design. The size of the designed bandpass filter is 2mm×1.25mm, and the passband frequency ranges from 3.3GHz to 4.2 GHz. The insertion loss is below 2.7dB over the pass band, and out-of-band attenuation exceeds 35dB from 0.45GHz to 2.4GHz as well as 36dB from 5.15GHz to 5.85GHz and 25.6dB from 6.6GHz to 8.4GHz. The design is verified through on-wafer measurement.