A “Calibration on the Fly” Method for Millimeter-wave On-wafer Measurement

In this paper, we demonstrate a “calibration on the fly (COF)” method for on-wafer measurement at millimeter-wave frequencies. The new calibration method is able to correct the probe-probe leakage or cross-talk that conventional calibration methods fail to deal with. In the COF method, we develop a new error model that treats the leakage term separately from device-under-tests (DUTs) that include the calibration standards and the actual devices to be tested. With a dummy calibration standard pair e.g., open or load, the leakage can be correctly measured during system calibration and removed during DUT measurements. Thus, the accuracy of the DUTs can be improved by at least 10%. Besides, we found that short pair should not be used as a dummy pair because singularity will be generated when solving equations based on the new error term.