Optical MEMS Accelerometer Based on Waveguide Bragg Grating Integrated with Crab-Leg Beam

Design and analysis of high-sensitivity optical MEMS accelerometer based on waveguide Bragg grating integrated with Crab-leg beam for low frequency applications is presented in this paper. Crab-leg beam are used to suspend the proof-mass to decrease spring stiffness with low device footprint. A waveguide Bragg grating is positioned on the shin of crab-leg to maximize strain sensitivity. To compensate for the temperature dependence of Bragg spectral properties, a reference grating positioned on the proof-mass is used. Due to excellent linear response, high-sensitivity of 184 pm/g and low fundamental frequency, the proposed accelerometer is suitable for microgravity and seismometry applications.