Modeling and Design of Planar-Spiral Merged-LC Resonators in a Standard CMOS Process

The realization of fully-integrated power management remains limited by the integration of passive components, particularly inductors. In this paper we describe a silicon-integrated merged-LC resonant structure that overcomes limitations of air-core spirals through the benefits of embedded capacitance and loss reduction techniques. Fundamental structure and design optimizations are discussed and experimental performance is verified in a resonant switched-capacitor (ReSC) converter achieving 85.5% peak efficiency in a 0.18 µ m bulk CMOS process.