Evolution and Capitalisation of a Family of MEMS Vibrating Structure Gyros (VSG)

The origins of the Silicon Sensing Systems Ltd (SSSL) and Atlantic Inertial Systems (AIS) - a Collins Aerospace company, MEMS Coriolis Vibratory Gyro (CVG) technology can be traced back to the early 1990's. The fundamental principles of operation have remained broadly unchanged and have been successfully applied to a wide and growing range of applications.SSSL together with its joint venture parent companies AIS and Sumitomo Precision Products of Japan (SPP), have continued to invest in applied research and in the practical integration of the MEMS Coriolis gyros year on year, generating a myriad of award winning innovations.These gyros have not only facilitated the development of a substantial range of industry leading IMU's and DMU's (Dynamic Measurement Units) for AIS and SSSL respectively, but have also been used as standalone sensors by a global user base, being widely integrated in to AHRS and other inertial reference systems.These innovations cover the full spectrum of signal processing architectures, sensors materials, MEMS design, MEMS processes, packaging, electronics, software, algorithms, manufacturing and calibration.This sustained focus, lessons learned and grounded heritage has produced a family of CVGs that is continually evolving and being proven in commercial and defense applications. Some of these innovations were first presented at DGON ISS in a 1997 paper [1] with additional presentations at subsequent conferences [2-4].In this paper we present a consolidated history of that heritage and the evolution of the SSSL inductive CVG design describing the technical innovations that have been applied. Some examples of the performance capability and range of applications are also provided. Whilst not without its challenges, this sets SSSL and AIS firmly on course to develop inertial systems that are, proven by data, to be beyond tactical grade.