Fabrication of Tin Oxide Based Gas Sensor in Ethanol Gas Sensing

In this study, the tin oxide (SnO
2
) based gas sensor with micro heater embedded (working temperature lower than 100 °C) was developed, and the ethanol-sensing characteristic was also discussed. The mico heater presented a fast, stable heating source while gas sensing process. The result indicated that the gas sensor had more than 88% in sensitivity regarding to the 10 ppm and 30 ppm ethanol gas sensing.