Growth of textured aluminum films on LiNbO3 piezoelectric substrate with ultrathin tantalum underlayer

In this paper the approach of improving aging of (AlCu2%) electrode of Surface acoustic Wave filters is presented. The goal of this study is to contribute of the improving of aging due to electromigration effect. This effect occur easily in high-frequency Surface Acoustic Wave (SAW) devices. For that purpose, the impact of a tantalum (Ta) thickness deposited between the electrodes (AlCu2%) and a piezoelectric LiNbO
3
is done. A heating post-process is also presented to increase the aging of such devices.