Design and Fabrication of High Performance Resonant Micro-Mirrors using the Standard SOIMUMPs Process

In this paper, we present the design and comparative analysis of two high frequency resonant micro-mirrors which incorporate direct and indirect electrostatic drive configurations. Innovative claims include: (1) the implementation of high fidelity fluid-structural coupled damping simulations in the design optimization process of indirect drive micro-mirrors; (2) demonstration of an optimized single-Si layer design that maximizes scanning efficiency while achieving minimal mirror dynamic deformation, $\delta_{dyn}$. A total optical scan angle, $\theta_{opt}$, of 37° at a scanning frequency, f
s
, of 25 kHz and a sinusoidal drive voltage amplitude, V
drive
of 200 V is achieved by the 1 mm-diameter, D, indirect drive micro-mirror design.