A force balance micromachined accelerometer with a self-noise of 1 ng/Hz1/2

MEMS Accelerometers are one of the core inertial measurement components in inertial navigation systems. This paper reports a high-precision force balance accelerometer based on MEMS technology. Utilizing a spring-mass structure with a low resonant frequency of 8 Hz and a periodic capacitive displacement transducer, the accelerometer has an extremely low self-noise of 1 ng/Hz1/2, which is one of the most sensitive MEMS-based accelerometers reported to date.