Status and Future Prospects of CMOS Scaling and Moore's Law - A Personal Perspective

For decades, CMOS scaling has been the key driving force in digital electronics. While scaling has always been demanding, recently more and more people in the CMOS community express concerns about a slowing down of scaling and the approaching end of Moore's Law. On the other hand, chip-makers still proceed with scaling and a lot of processing innovations and new concepts are explored. In the present paper, we review the status of CMOS scaling, discuss important trends in digital CMOS and information processing, and provide our personal view on the future of CMOS scaling and Moore's Law.