Local Anodic Oxidation Proceses Influence and Temterature Stability on the Memristive Propherties of Titanium Oxide Nanostructures for ReRAM Development

The paper presents the researching results of the memristor effect on titanium oxide nanostructures obtained by local anodic oxidation. Studies have been carried out on the effect of air humidity in the process chamber during local anodic oxidation on the memristor structures main parameters. Based on oxygen vacancies distribution numerical simulation in the oxide volume formed by this method, the obtained dependences were explained. A ReRAM layout consisting of 10 memristors was developed and manufactured, and the temperature influence on its characteristics was investigated. The results can be used in the technological processes development for the formation of memristor structures based on titanium oxide nanostructures.