A Coriolis Force Compensated Micro Thermal Convective Accelerometer with Low Crossing Effect

For the first time, we designed and fabricated a Coriolis-force compensated micro thermal convective accelerometer (CMTCA), which could reduce the Cross-axis sensitivity of a double-aixs MTCA within 2% from 15%. In this design, a couple of compensation detectors are implemented for each of the master detectors. The master detectors are used for acceleration input detecting. By means of this novel structure, the angular input signal could be monitored, which could be used to compensate the cross-axis signal by means of the signal processing circuit simultaneously. This novel design is quite meaningful for improving the accuracy of MTCA and decoupling the signal between acceleration and gyroscope.