Calculation and Modeling of the Main Parameters of a Differential Capacitive Micromechanical Accelerometer

Using the finite element modeling in ANSYS, modeling and calculation of the main parameters of the sensitive element of a differential capacitive micromechanical accelerometer were performed. These parameters are the coefficient of elasticity of the suspension, the natural frequency of the sensitive element and relative damping coefficients. The calculation of the stress, which is an integral parameter of the MEMS accelerometer, depends on the sensitive element structure - the coefficient of elasticity of the suspension, the area of the plates, the distance between the plates. An algorithm has been developed for the manufacturing process of the sensitive element; recommendations are given for improving the design.