Design and Optimization of Structural Eelements of a Piezoresistive Pressure Sensor

The results of the influence of the diaphragm shape of a piezoresistive pressure sensor on its parameters are determined in this article. Square, rectangular and round diaphragms made of monocrystalline silicon were studied. With the help of the ANSYS program, the simulation was performed, the parameters - deformations and mechanical stresses arising in diaphragms were calculated and which turned out to be different for diaphragms of different shapes. The results are analyzed; recommendations on the choice of diaphragm shape in sensors are given.