Research and Development of the Deep Plasma-Chemical Silicon Etching Process for the Creation of a Silicon Element with a Vertical Profile

The development of microelectronics technologies has led to significant progress in the field of miniaturization of various mechanical structures. Over time, a set of technological processes has formed by incorporating the "know-how" microelectronics, precision mechanics and a number of other specific technologies, which made it possible to manufacture various elements of micromechanical devices. This field is called microsystem technology. It allows one to manufacture a wide range of miniature devices for various applications with sizes up to several millimeters. These devices include actuators and the electronic components and are called micromechanical systems (devices).