Design and Additive Microfabrication of a Two-Pole 287-GHz Waveguide Bandpass Filter

This letter presents the design and fabrication of a 287-GHz resonator and a bandpass filter. The fabrication is conducted using an additive microfabrication process, based on successive photolithography and metal electroplating steps. This process has allowed the fabrication of a single-cavity resonator and a 3.5% relative bandwidth two-pole bandpass filter. The cavity has a measured unloaded Q of 137, and the filter has a measured loss of 4.6 dB and matching better than 20 dB in very good agreement with E-M simulation results.