A D-band 4-ways power splitter/combiner implemented on a 28nm bulk CMOS process

This paper presents a 4-ways passive power splitter/combiner based on Wilkinson dividers implemented in the BEOL of a conventional 28nm bulk CMOS process achieving better than-20 dB of isolation and 2.5 dB of insertion loss across 25 GHz of band at 140 GHz.