Electroforming and Resistive Switching in Aluminum Oxide Thin Films

This paper presents the study of electroforming procedure required for the resistive switching phenomena of Pt/Al
2
O
3
/Pt structures with different Al
2
O
3
layer thickness. The sequence of electroforming procedure is experimentally determined. Electroforming leads to specific nonlinear dependence of the current on the voltage applied to the Pt/Al
2
O
3
/Pt structure. It was found that order of magnitude of the structure resistance after electroforming indicates bipolar resistive switching behavior of the Pt/Al
2
O
3
/Pt structure.