Design and Performance Analysis of Piezoresistive Circular Diaphragm Based Acoustic Sensor

Acoustic sensors have been used for various applications including sensing the signal and condition monitoring of various devices. The fabrication method and analysis of different parameters of sensor like resonant frequency, nonlinearity, hysteresis, sensitivity, and repeatability is very important for these applications. In this paper, we have presented simulation, fabrication and static and dynamic calibration of the piezoresistive circular diaphragm. The designed KAPTON circular diaphragm of thickness 0.075 mm and diameter of 20mm has a natural frequency of 1 KHz and has a good response at this frequency. Sound pressure level (SPL) applied for the device lies between 130 dB to 150 dB. The sensitivity of the device obtained is 0.048635 V/mBar and the various parameters like non-linearity, hysteresis and repeatability plot were obtained to study the characteristics of the device.