Microfabrication and Study of Planar Slow-Wave Structures for LowVoltage V-band and W-band Vacuum Tubes

We consider further development of our original technology for microfabrication of millimeter-band planar microstrip slow-wave structures (SWS). The technology is based on magnetron sputtering and laser ablation methods. V-band (50-75 GHz) and W-band (75-110 GHz) SWSs are fabricated and characterized by scanning electron and optical microscopy. Electromagnetic parameters of the developed SWSs are studied by numerical simulation and cold-test measurement. We have also carried out preparations and preliminary technological steps for the microfabrication of D-band (110-170 GHz) planar microstrip slow-wave structures.