Industrial Applications with Semiconductor-Based CW Terahertz System

In developing terahertz (THz) technologies that are more suitable for industrial applications, we have focused on research on continuous-wave (CW) THz technologies to develop small, low-cost, and multifunctional THz devices and systems. In this study, we present an example of a practical industrial application of our CW THz system, a nondestructive evaluation (NDE) system: cost-effective high-speed 1-D/2-D reflective imaging system and real-time thickness monitoring system of slurry film. Although further improvements to photonics-based THz technologies are necessary, we believe that efforts in this field will begin an era of THz technologies as a widely-used industrial technique.