Enhancing Vibration Robustness and Noise in Automotive Gyroscope with Large Drive Motion and Levered Sense Mode

The work presents a new geometry of amplitude-modulated in-plane and out-of-plane gyroscopes for improved vibration rejection in automotive applications. To this purpose, the design embeds a levered sense mode, enables to reach drive displacements as large as 13 μm and allows complete electromechanical quadrature compensation. Under the effect of 10 g (gravity units) peak-to-peak vibrations, the sensors demonstrate 10- to 100-fold improved vibration rejection compared to previous yaw-rate geometries, holding similar characteristics for pitch-rate sensing. At the same time, noise and stability performance are 2-fold better than best-in-class automotive gyroscopes.