Low Voltage Haptic Slider Built Using Sol-Gel Thin-Film PZT Actuators Reported on Glass

This paper reports on the development of a unique haptic solution based on thin-film Pb(Zr0.52,Ti0.48)O3 (PZT) actuators reported on glass substrate, allowing the feeling of textured surfaces playing with the variable friction between a finger and the plate resonator, induced by ultrasonic vibration. The integration of PZT actuators on glass substrate leads to a plate displacement amplitude multiplied by more than a factor 7 compared to the displacement amplitude induced by thin-film AlN actuators that are classically deposited on glass substrate. It opens the way to low voltage and high performances haptic devices.