A Mems-Based Condensation Particle Counter for Accurate and Real-Time Monitoring of Airborne Nanoparticles at Points of Interest

Nanoparticle monitoring is very important due to their serious health hazard, while personal devices for monitoring them have not been developed yet. To accurately monitor airborne nanoparticles at points of interest on real-time basis, we developed a high-performance MEMS-based condensation particle counter (CPC). Our system could detect extremely small particles (8.6 nm) with high accuracy (deviation within 3.8 % in number concentration), showing high performance comparable to the reference CPC.