A Tester of the MEMS Accelerometers Operation Modes

The work deals with the issues of analyzing the operation modes of integrated circuits of MEMS accelerometers using built-in self-test functions and motion detectors. Test measurement techniques are intended for compensation for the time instability of the measurement track of an accelerometer. Test measurement techniques consist in formation of periodical deflection of a preset magnitude inside inertial parts of MEMS structures. Motion detectors are implemented using an integrated memory management system with a 32-level first in first out buffer. The work is aimed at developing a tester of operation modes and searching patterns in the characteristics of MEMS accelerometers inside IMU modules. The subject of study is the accelerometer ADXL345 inside the IMU module GY-SO. We have formulated basic requirements for procedures of investigation into the parameters of accelerometers and other components of IMUs. Upon the formulated requirements we have developed a hardware-software tool IMUTester. The work presents examples of investigation into the operation modes of MEMS accelerometers ADXL345 including the test measurement and detection modes.