On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control

We present an on-chip cavitation generation system based on ultra-high-speed flow control. Novelties are that: (1) cavitation is observable in a high-rigidity microfluidic chip consisting of glass-Si-glass layered substrates, and (2) cavitation can be generated only based on flow control. As results, constructing on-chip membrane pumps for ultrahigh-speed flow, we succeeded in the on-chip cavitation generation by ultra-high-speed flow control and observing its phenomenon on a microscope. In addition, we found that the result corresponded to the Finite Element Method (FEM) analysis which showed that the cavitation occurred at the area where the dynamic pressure was lower than the saturated vaper pressure of water.