A Micro-Hotplate for Mems-Based H2s Sensor

This paper reports an in-plane micro-hotplate fabricated by MEMS process for H
₂
S gas sensor. Both the heating electrodes and the test electrodes are designed in the same plane, which improves the heating efficiency and simplify the fabrication process. With a step voltage control of the hotplate, fast response and recovery processes have been achieved for H
₂
S detection at low concentration of 1ppm. The MEMS micro-hotplate could be useful to improve the recovery property as well as the selectivity of the gas sensors.