Integrated Fabrication of Serially Connected High Voltage Microbatteries via Multilayer Electrodeposition

We report a scheme for the integrated fabrication of MEMS-scale, series-connected battery cells. The approach exploits multilayer electrodeposition of active and sacrificial layers to generate structures that can be formed into high voltage power sources. Aqueous, non-vacuum based fabrication, via electrodeposition, enables high throughput and deterministic control of layer thicknesses and battery performance. Batteries manufactured using this technique offer the potential to match supply voltages to system needs, ranging from conventional electronics to direct drive of high voltage electrostatic or piezoelectric MEMS.