Transparent PZT MIM Capacitors on Glass for Piezoelectric Transducer Applications

This paper reports on the realization and characterization of a fully transparent Pb(Zr0.52,Ti0.48)O3 (PZT) based MIM capacitor on glass substrate for piezoelectric transducer applications. A PZT film grown on a 200 mm Si substrate was layer transferred to a glass substrate using a new technological process. The transferred PZT film keeps its high (100) texturation obtained during deposition, which is required for optimal piezoelectric properties. ITO/PZT/ITO capacitors show excellent ferroelectric properties, thus proving piezoelectric behavior. This first demonstration opens the way to the integration of transparent piezoelectric actuators on glass for haptic devices.