Thin-Film Magnetic Inductors for High-Frequency Switching Regulator

This paper presents the design aspects of thin-film magnetic inductors for their use in high-frequency integrated voltage regulators (IVR). Performance metrics for solenoid inductors such as inductance density, quality factor and operating frequency are maximized using optimum design parameters. These inductors are developed using thin-film magnetic core within the redistribution (RDL) layers and the measurement results are presented. The results show achieving Q>10 at 100MHz. Finally, these inductors are used in a two-phase PWM controlled interleaved IVR switching at 100MHz.