Sliding-Mode Control of Piezoelectric Actuator using Bond Graph

In this document, we concept a sliding mode control based on the Bond Graph approach, for an active current-distance between the Tip and Sample in our scanning system (STM). However, this work gives a robust model to optimize the displacement of a piezoelectric actuator using in the scanner Head of a scanning tunneling microscope, based on the state equation divided from the Bond Graph approach. In order to control the feedback loop between the tip and the sample, and the internal dynamic behavior of the piezoelectric actuator, for this the Tip-Sample distance was analyzed, including disturbances and parasitic effects of mechanics caused by the movement of the scanner Head. Moreover, we proposed a sliding mode control for our system, the global system was studied and analyzed to use in the digitalization; the performance of the proposed model was detailed and discussed. The simulation under input excitation, show the good results and fast responses in the 20-sim environment, with robust sliding mode command.