A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

A novel advanced design of the planar multipole resonance probe (pMRP) using LTCC-technology is investigated in this contribution. Integrated into the reactor wall, the planar sensor structure enables a minimally invasive in-situ plasma monitoring. Due to the ceramic substrate material, a substantial improved resistance against high temperatures can be achieved, extending the potential fields of application. The used multilayer structure with vertically stacked components ensures a high level of integration and further enhances the mechanical robustness leading to an industry compatible plasma sensor design. The probe is investigated within 3D electromagnetic simulations and its applicability is demonstrated by measurements in a double inductively coupled plasma (DICP).