Broadband vs. Sensitive CMUT Linear Array: A Comparative Study from Bare Chip Up to Image

This work is an experimental validation of a new approach to design and to optimize the response of CMUT -based linear arrays. The method is applied to the design of linear arrays centered at 10 MHz. Two configurations, with two different spectral signatures (sensitive or broadband), were fabricated, measured and compared. Experimental data agree very well with the expected performances. The method is hence validated but experimental results pointed out the importance of the acoustic windows on the final performances of the probe.