A Scale Factor Self-Calibration Method for a Batch of MEMS Gyroscopes Based on Virtual Coriolis Force

A calibration method for a batch of micro gyroscopes to obtain their scale factor and bandwidth is presented in this paper, which is based on virtual Coriolis force. And in the detection axis of the micro gyroscope, an electrostatic force is set to simulate the real Coriolis force to calibrate their scale factor and bandwidth. Thirteen micro gyroscopes are tested to verify the feasibility of this method. Compared with traditional method, the proposed method can obtain the scale factor of a batch of gyroscopes with an error less than 0.8%. Besides, the experiment results show that bandwidth of the micro gyroscope measured is 354.3Hz by the virtual scale factor method with a maximum phase error of 3.39 deg, which are in close agreement with the simulation result 349.5Hz