Apply RPA (Robotic Process Automation) in Semiconductor Smart Manufacturing

To reduce human resources in trivial and repetitive work, we come up with a method that used Robotic Process Automation (RPA) [1], which is an emerging form of business process automation technology based on the notion of software robots or artificial intelligence workers, to achieve automatically remote control equipment, such as picture shown on Figure 1. It is expected that applying this method to the factory can achieve the goal of unmanned factory.