Polymorphic impedance matching technique for MEMS phase shifter

The amplitude and phase consistency control level is an important factor affecting the performance of phased array antenna. MEMS phase shifter has important application potential in phased array antenna, but the current MEMS phase shifter device has poor amplitude and phase consistency, making it difficult to integrate directly in phased array antenna system. In this paper, a novel multi-states matching technology for MEMS phase shifter is proposed to overcome the above-mentioned difficulty. To control amplitude fluctuation and phase shift error of phase shifter in the using process, we proposed a general network design method focusing on the given polymorphic S parameter matrix of MEMS phase shifter based on the theory of microwave network. The key of the method is as following: with the help of the mature microwave network synthesis method and the particle swarm optimization algorithm combined by matching circuit parameter optimization, obtain actual S parameter matrixes of two polymorphic matching networks for the corresponding MEMS phase shifter, so as to enhance the amplitude and phase consistency index of integrated application. The simulation results verify the feasibility of the method, and so that we form a technical way to improve the consistency of amplitude and phase of MEMS phase shifter system through polymorphic matching network, which has important theoretical and practical value.