Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology

We have developed a novel 512 × 320 micro mirror array consisting of 2axis-tip-tilt actuators with 48μm pixel size, allowing a continuous, pure tip-tilt motion up to 3.5° in arbitrary directions, fully calibratable with standard deviations of better than 0.025°. The device is realized in a fully CMOS compatible process with an underlying integrated address circuitry.