Aluminum-Polymer Deformable Mirror Using Electromagnetic Actuators for Spatial Light Modulation

This paper presents a low operational voltage and low current Lorentz force deformable mirror (DM) for adaptive optics (AO). The system consists of a 12×12 mm
²
Al/SU-8/Al mirror attached to a 5×5 actuator array. The actuators are formed from single crystal silicon by using bulk-micromachining. For the mirror, aluminum coated flexible SU-8 is used as the structural material. The prototype DM demonstrated a mirror deformation of 40μm at 9 mA current ( with 35 Ω Al) within a 0.35 Tesla magnetic field. Operation frequency of 2 kHz was shown possible, which can be suitable for large deformation AO applications.